Jay Shieh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jay Shieh returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Sub-7-nm textured ZrO2 with giant ferroelectricity
2Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
3Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films