Yu-Sen Jiang Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Yu-Sen Jiang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Densification of AlN Passivation Layer on Epitaxial Ge for Enhancement of Reliability and Electrical Performance of High-K Gate Stacks|
|2||Sub-7-nm textured ZrO2 with giant ferroelectricity|