Sheng-Han Yi Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sheng-Han Yi returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Sub-7-nm textured ZrO2 with giant ferroelectricity|
|2||AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing|
|3||Sub-nanometer heating depth of atomic layer annealing|