Sheng-Han Yi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sheng-Han Yi returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing
2Sub-7-nm textured ZrO2 with giant ferroelectricity
3Sub-nanometer heating depth of atomic layer annealing