Publication Information

Title: Plasma-Enhanced Atomic Layer Deposition of Ultrathin Oxide Coatings for Stabilized Lithium-Sulfur Batteries

Type: Journal

Info: Advanced Energy Materials Volume 3, Issue 10, pages 1308-1315, October, 2013

Date: 2013-06-12

DOI: http://dx.doi.org/10.1002/aenm.201300253

Author Information

Name

Institution

Georgia Institute of Technology

Georgia Institute of Technology

Georgia Institute of Technology

Georgia Institute of Technology

Korea Institute of Science and Technology

Georgia Institute of Technology

Films

Deposition Temperature = 170C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Images

TEM, Transmission Electron Microscope

Unknown

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

Zeiss Ultra 60 FE-SEM

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo Scientific K-Alpha

Images

SEM, Scanning Electron Microscopy

Zeiss Ultra 60 FE-SEM

Substrates

Carbon Fiber

Keywords

Lithium-ion

Batteries

Notes

Ultratech Fiji PEALD Al2O3 for enhanced Li-S battery cycle stability.

163



Shortcuts



© 2014-2018 plasma-ald.com