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Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
Self-aligned tip deinsulation of atomic layer deposited Al2O3 and parylene C coated Utah electrode array based neural interfaces
Type:
Journal
Info:
J Micromech Microeng. 2014 March 1; 24(3): 035003
Date:
2014-02-04
Author Information
| Name | Institution |
|---|---|
| Xianzong Xie | University of Utah |
| Loren Rieth | University of Utah |
| Sandeep Negi | University of Utah |
| Rajmohan Bhandari | Blackrock Microsystems |
| Ryan Caldwell | University of Utah |
| Rohit Sharma | University of Utah |
| Prashant Tathireddy | University of Utah |
| Florian Solzbacher | University of Utah |
Films
Plasma Al2O3
Film/Plasma Properties
Substrates
| Ir |
Keywords
| Encapsulation |
| Medical |
Notes
| 1378 |