Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Self-aligned tip deinsulation of atomic layer deposited Al2O3 and parylene C coated Utah electrode array based neural interfaces
Type:
Journal
Info:
J Micromech Microeng. 2014 March 1; 24(3): 035003
Date:
2014-02-04
Author Information
Name | Institution |
---|---|
Xianzong Xie | University of Utah |
Loren Rieth | University of Utah |
Sandeep Negi | University of Utah |
Rajmohan Bhandari | Blackrock Microsystems |
Ryan Caldwell | University of Utah |
Rohit Sharma | University of Utah |
Prashant Tathireddy | University of Utah |
Florian Solzbacher | University of Utah |
Films
Plasma Al2O3
Film/Plasma Properties
Substrates
Ir |
Keywords
Encapsulation |
Medical |
Notes
1378 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |