Self-aligned tip deinsulation of atomic layer deposited Al2O3 and parylene C coated Utah electrode array based neural interfaces
Type:
Journal
Info:
J Micromech Microeng. 2014 March 1; 24(3): 035003
Date:
2014-02-04
Author Information
Name | Institution |
---|---|
Xianzong Xie | University of Utah |
Loren Rieth | University of Utah |
Sandeep Negi | University of Utah |
Rajmohan Bhandari | Blackrock Microsystems |
Ryan Caldwell | University of Utah |
Rohit Sharma | University of Utah |
Prashant Tathireddy | University of Utah |
Florian Solzbacher | University of Utah |
Films
Plasma Al2O3
Film/Plasma Properties
Substrates
Ir |
Notes
1378 |