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Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
Carbon content control of silicon oxycarbide film with methane containing plasma
Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries
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Publication Information
Title:
Self-aligned tip deinsulation of atomic layer deposited Al2O3 and parylene C coated Utah electrode array based neural interfaces
Type:
Journal
Info:
J Micromech Microeng. 2014 March 1; 24(3): 035003
Date:
2014-02-04
Author Information
| Name | Institution |
|---|---|
| Xianzong Xie | University of Utah |
| Loren Rieth | University of Utah |
| Sandeep Negi | University of Utah |
| Rajmohan Bhandari | Blackrock Microsystems |
| Ryan Caldwell | University of Utah |
| Rohit Sharma | University of Utah |
| Prashant Tathireddy | University of Utah |
| Florian Solzbacher | University of Utah |
Films
Plasma Al2O3
Film/Plasma Properties
Substrates
| Ir |
Keywords
| Encapsulation |
| Medical |
Notes
| 1378 |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |