Publication Information

Title:
Self-aligned tip deinsulation of atomic layer deposited Al2O3 and parylene C coated Utah electrode array based neural interfaces
Type:
Journal
Info:
J Micromech Microeng. 2014 March 1; 24(3): 035003
Date:
2014-02-04

Author Information

Name Institution
Xianzong XieUniversity of Utah
Loren RiethUniversity of Utah
Sandeep NegiUniversity of Utah
Rajmohan BhandariBlackrock Microsystems
Ryan CaldwellUniversity of Utah
Rohit SharmaUniversity of Utah
Prashant TathireddyUniversity of Utah
Florian SolzbacherUniversity of Utah

Films

Plasma Al2O3


Film/Plasma Properties

Substrates

Ir

Keywords

Encapsulation
Medical

Notes

1378