Publication Information

Title: A Capacitance-to-Frequency Converter with On-Chip Passivated Microelectrodes for Bacteria Detection in Saline Buffers up to 575 MHz

Type: Journal

Info: IEEE Transactions on Circuits and Systems II:Express Briefs, (Volume:PP, Issue:99)

Date: 2014-11-10

DOI: http://dx.doi.org/10.1109/TCSII.2014.2369111

Author Information

Name

Institution

Universite catholique de Louvain (UCL)

Universite catholique de Louvain (UCL)

Universite catholique de Louvain (UCL)

Universite catholique de Louvain (UCL)

Universite catholique de Louvain (UCL)

Films

Deposition Temperature = 25C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Al

Keywords

Diffusion Barrier

Corrosion

Notes

Ultratech Fiji PEALD Al2O3 for bacteria detection device electrode corrosion prevention.

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