A Capacitance-to-Frequency Converter with On-Chip Passivated Microelectrodes for Bacteria Detection in Saline Buffers up to 575 MHz

Type:
Journal
Info:
IEEE Transactions on Circuits and Systems II:Express Briefs, (Volume:PP, Issue:99)
Date:
2014-11-10
DOI:
http://dx.doi.org/10.1109/TCSII.2014.2369111

Author Information

Name Institution
Numa CouniotUniversite catholique de Louvain (UCL)
David BolUniversite catholique de Louvain (UCL)
Olivier PonceletUniversite catholique de Louvain (UCL)
Laurent A. FrancisUniversite catholique de Louvain (UCL)
Denis FlandreUniversite catholique de Louvain (UCL)

Films

Plasma Al2O3

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 25C

Film/Plasma Properties

Substrates

Al

Notes

Ultratech Fiji PEALD Al2O3 for bacteria detection device electrode corrosion prevention.
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