Laurent A. Francis Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Laurent A. Francis returned 9 record(s).

Number	Title
1	Effects of radiation and cryogenic temperatures on the electromechanical properties of materials used in microsystems
2	Damage evaluation in graphene underlying atomic layer deposition dielectrics
3	A Capacitance-to-Frequency Converter with On-Chip Passivated Microelectrodes for Bacteria Detection in Saline Buffers up to 575 MHz
4	Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
5	Highly transparent low capacitance plasma enhanced atomic layer deposition Al₂O₃-HfO₂ tunnel junction engineering
6	Lytic enzymes as selectivity means for label-free, microfluidic and impedimetric detection of whole-cell bacteria using ALD-Al₂O₃ passivated microelectrodes
7	Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems
8	Passivation effects of atomic-layer-deposited aluminum oxide
9	Room temperature atomic layer deposition of Al₂O₃ and replication of butterfly wings for photovoltaic application