Top-down fabrication of fluorine-doped tin oxide nanopillar substrates for solar water splitting

Type:
Journal
Info:
RSC Adv., 2017, 7, 28350-28357
Date:
2017-05-08
DOI:
http://dx.doi.org/10.1039/C7RA02937C

Author Information

Name Institution
Maureen H. TangDrexel University
Pongkarn ChakthranontStanford University
Thomas F. JaramilloStanford University

Films

Plasma WO3

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
BTBMW, TBIDMW, bis(t-Butylimido) bis(DiMethylamido) Tungsten
CAS#: 406462-43-9
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 350C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Magellan XH

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Magellan XH

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: PHI VersaProbe 5000

Characteristic: Optical Absorption
Analysis: UV-VIS Spectroscopy
Diagnostic: -

Substrates

FTO, F:SnO2

Notes

1133