Publication Information

Title:
Influence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer deposition
Type:
Journal
Info:
Surface & Coatings Technology 337 (2018) 44 - 52
Date:
2017-12-23

Author Information

Name Institution
Karyn L. JarvisAustralian Nuclear Science and Technology Organisation
Peter J. EvansAustralian Nuclear Science and Technology Organisation
Gerry TrianiAustralian Nuclear Science and Technology Organisation

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Custom

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Wetting Angle
Analysis: -

Substrates

PET, Polyethylene Terephthalate
PEN, Polyethylene Napthalate
Silicon

Keywords

Diffusion Barrier

Notes

1395