Influence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer deposition

Type:
Journal
Info:
Surface & Coatings Technology 337 (2018) 44 - 52
Date:
2017-12-23

Author Information

Name Institution
Karyn L. JarvisAustralian Nuclear Science and Technology Organisation
Peter J. EvansAustralian Nuclear Science and Technology Organisation
Gerry TrianiAustralian Nuclear Science and Technology Organisation

Films


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Custom

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Wetting Angle
Analysis: -

Substrates

PET, Polyethylene Terephthalate
PEN, Polyethylene Napthalate
Silicon

Notes

1395