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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Peter J. Evans Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter J. Evans returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer deposition
2Comparisons of alumina barrier films deposited by thermal and plasma atomic layer deposition