Tin Oxynitride Anodes by Atomic Layer Deposition for Solid-State Batteries
Type:
Journal
Info:
Chem. Mater. 2018, 30, 8, 2526-2534
Date:
2018-03-30
Author Information
| Name | Institution |
|---|---|
| David M. Stewart | University of Maryland |
| Alexander J Pearse | University of Maryland |
| Nam S. Kim | University of Maryland |
| Elliot J. Fuller | Sandia National Laboratories |
| A. Alec Talin | Sandia National Laboratories |
| Keith E. Gregorczyk | University of Maryland |
| Sang Bok Lee | University of Maryland |
| Gary W. Rubloff | University of Maryland |
Films
Thermal SnO2
Plasma SnN
Other SnON
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Morphology, Roughness, Topography
Analysis: XRR, X-Ray Reflectivity
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Battery Properties
Analysis: Electrochemical Analysis
Substrates
| Stainless Steel |
| Silicon |
| Pt |
Notes
| 1606 |