Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Nam S. Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nam S. Kim returned 1 record(s).

NumberTitle
1Tin Oxynitride Anodes by Atomic Layer Deposition for Solid-State Batteries