Publication Information

Title: Band alignment of Al2O3 with (-201) β-Ga2O3

Type: Journal

Info: Vacuum, Volume 142, 2017, Pages 52 - 57

Date: 2017-05-07

DOI: http://dx.doi.org/10.1016/j.vacuum.2017.05.006

Author Information

Name

Institution

University of Florida

University of Florida

University of Florida

University of Florida

University of Florida

Dankook University

Tamura Corporation

Films

Deposition Temperature = 200C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Binding

XPS, X-ray Photoelectron Spectroscopy

Physical Electronics PHI 5100 ESCA

Band Gap

REELS, Reflection Electron Energy Loss Spectroscopy

Unknown

Substrates

Ga2O3

Keywords

Notes

Compares PEALD with sputtered film.

985



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