Publication Information

Title:
Band alignment of Al2O3 with (-201) β-Ga2O3
Type:
Journal
Info:
Vacuum, Volume 142, 2017, Pages 52 - 57
Date:
2017-05-07

Author Information

Name Institution
Patrick H. Carey IVUniversity of Florida
Fan RenUniversity of Florida
David HaysUniversity of Florida
Brent P. GilaUniversity of Florida
S. J. PeartonUniversity of Florida
Soohwan JangDankook University
A. KuramataTamura Corporation

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Band Gap
Analysis: REELS, Reflection Electron Energy Loss Spectroscopy

Substrates

Ga2O3

Keywords

Notes

Compares PEALD with sputtered film.
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