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2021 Year in Review




The publication database currently has 1628 entries.
Search from:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics
90 Theses

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Recent Database Additions
Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
Search 1628 plasma ALD publications by:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics

Fan Ren Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fan Ren returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
2Annealing Effects on the Band Alignment of ALD SiO2 on (InxGa1-x)2O3 for x = 0.25-0.74
3Band alignment of Al2O3 with (-201) β-Ga2O3
4Band alignment of atomic layer deposited SiO2 on (010) (Al0.14Ga0.86)2O3
5Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ β-Ga2O3
6Band Offsets for Atomic Layer Deposited HfSiO4 on (Al0.14Ga0.86)2O3
7Comparison of passivation layers for AlGaN/GaN high electron mobility transistors
8Effect of Deposition Method on Valence Band Offsets of SiO2 and Al2O3 on (Al0.14Ga0.86)2O3
9GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation
10High breakdown voltage in AlN/GaN metal-insulator-semiconductor high-electron-mobility transistors

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