Brent P. Gila Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Brent P. Gila returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Band alignment of Al2O3 with (-201) β-Ga2O3
2	Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ β-Ga2O3
3	Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
4	GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation
5	High breakdown voltage in AlN/GaN metal-insulator-semiconductor high-electron-mobility transistors

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