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A. Kuramata Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. Kuramata returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electron channel mobility in silicon-doped Ga2O3 MOSFETs with a resistive buffer layer
2Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ β-Ga2O3
3Field-Plated Ga2O3 MOSFETs With a Breakdown Voltage of Over 750 V
4Epitaxially grown crystalline Al2O3 interlayer on β-Ga2O3 (010) and its suppressed interface state density
5Band alignment of Al2O3 with (-201) β-Ga2O3
6Ga2O3 MOSFETs Using Spin-On-Glass Source/Drain Doping Technology