Publication Information

Title:
Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices
Type:
Conference Proceedings
Info:
2013 Transducers & Eurosensors XXVII: The 17th International Conference on 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
Date:
2013-06-13

Author Information

Name Institution
Xianzong XieUniversity of Utah
Loren RiethUniversity of Utah
Prashant TathireddyUniversity of Utah
Florian SolzbacherUniversity of Utah

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Diffusion Barrier Properties
Analysis: I-V, Current-Voltage Measurements

Characteristic: Diffusion Barrier Properties
Analysis: EIS, Electrochemical Impedance Spectroscopy

Substrates

Au

Keywords

Encapsulation

Notes

See on-line thesis.
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