Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al2O3 and Parylene C for Biomedical Implantable Devices
Type:
Journal
Info:
IEEE Transactions on Biomedical Engineering, Volume:60, Issue:10, 2013
Date:
2013-06-06
Author Information
| Name | Institution |
|---|---|
| Xianzong Xie | University of Utah |
| Loren Rieth | University of Utah |
| Ryan Caldwell | University of Utah |
| M. Diwekar | University of Utah |
| Prashant Tathireddy | University of Utah |
| Rohit Sharma | University of Utah |
| Florian Solzbacher | University of Utah |
Films
Plasma Al2O3
Film/Plasma Properties
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Substrates
| SiO2 |
| Au |
Notes
| 571 |