Publication Information

Title: Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al2O3 and Parylene C for Biomedical Implantable Devices

Type: Journal

Info: IEEE Transactions on Biomedical Engineering, Volume:60, Issue:10, 2013

Date: 2013-06-06

DOI: http://dx.doi.org/10.1109/TBME.2013.2266542

Author Information

Name

Institution

University of Utah

University of Utah

University of Utah

University of Utah

University of Utah

University of Utah

University of Utah

Films

Deposition Temperature = 120C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Unknown

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Substrates

SiO2

Au

Keywords

Encapsulation

Diffusion Barrier

Notes

571



Shortcuts



© 2014-2018 plasma-ald.com