Publication Information

Title:
Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al2O3 and Parylene C for Biomedical Implantable Devices
Type:
Journal
Info:
IEEE Transactions on Biomedical Engineering, Volume:60, Issue:10, 2013
Date:
2013-06-06

Author Information

Name Institution
Xianzong XieUniversity of Utah
Loren RiethUniversity of Utah
Ryan CaldwellUniversity of Utah
M. DiwekarUniversity of Utah
Prashant TathireddyUniversity of Utah
Rohit SharmaUniversity of Utah
Florian SolzbacherUniversity of Utah

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Substrates

SiO2
Au

Keywords

Encapsulation
Diffusion Barrier

Notes

571