Publication Information

Title:
Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors
Type:
Journal
Info:
Journal of Vacuum Science & Technology B 31, 01A107 (2013)
Date:
2012-11-02

Author Information

Name Institution
Enrique MirandaUniversitat Autònoma de Barcelona
David JiménezUniversitat Autònoma de Barcelona
Jordi SuñéUniversitat Autònoma de Barcelona
É. O'ConnorTyndall National Institute, University College Cork
Scott MonaghanTyndall National Institute, University College Cork
Ian M. PoveyTyndall National Institute, University College Cork
Karim CherkaouiTyndall National Institute, University College Cork
Paul K. HurleyTyndall National Institute, University College Cork

Films


Film/Plasma Properties

Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements

Substrates

SiO2

Keywords

Capacitors

Notes

658