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Publication Information

Title: Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors

Type: Journal

Info: Journal of Vacuum Science & Technology B 31, 01A107 (2013)

Date: 2012-11-02

DOI: http://dx.doi.org/10.1116/1.4768681

Author Information

Name

Institution

Universitat Autònoma de Barcelona

Universitat Autònoma de Barcelona

Universitat Autònoma de Barcelona

Tyndall National Institute, University College Cork

Tyndall National Institute, University College Cork

Tyndall National Institute, University College Cork

Tyndall National Institute, University College Cork

Tyndall National Institute, University College Cork

Films

Deposition Temperature Range N/A

352535-01-4

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Leakage Current

I-V, Current-Voltage Measurements

Unknown

Substrates

SiO2

Keywords

Capacitors

Notes

658


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