É. O'Connor Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by É. O'Connor returned 3 record(s).

Number	Title
1	Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al₂O₃ Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO₂/In_xGa_1-xAs (M = Hf\|Zr, x = 0\|0.53) Gate Stacks
2	Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO₂/Pt capacitors
3	Structural and electrical analysis of the atomic layer deposition of HfO₂/n-In_0.53Ga_0.47As capacitors with and without an Al₂O₃ interface control layer