Ian M. Povey Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ian M. Povey returned 10 record(s).

Number	Title
1	Structural and electrical analysis of the atomic layer deposition of HfO₂/n-In_0.53Ga_0.47As capacitors with and without an Al₂O₃ interface control layer
2	Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD
3	Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
4	High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
5	Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
6	Low sheet resistance titanium nitride films by low-temperature plasma-enhanced atomic layer deposition using design of experiments methodology
7	Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO₂/Pt capacitors
8	Evaluation of V₂O₅ Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
9	Growth of V₂O₅ Films for Battery Applications by Pulsed Chemical Vapor Deposition
10	Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al₂O₃ Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO₂/In_xGa_1-xAs (M = Hf\|Zr, x = 0\|0.53) Gate Stacks