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Growth of V2O5 Films for Battery Applications by Pulsed Chemical Vapor Deposition

Type:
Journal
Info:
ECS Transactions, 85 (13) 83-94 (2018)
Date:
2018-06-01
DOI:
http://dx.doi.org/10.1149/08513.0083ecst

Author Information

Name Institution
I. I. KazadojevTyndall National Institute, University College Cork
Shane O'BrienTyndall National Institute, University College Cork
Louise P. RyanTyndall National Institute, University College Cork
M. ModreanuTyndall National Institute, University College Cork
P. OsiceanuInstitute of Physical Chemistry I.G. Murgulescu
S. SomacescuInstitute of Physical Chemistry I.G. Murgulescu
D. VernardouTechnological Educational Institute of Crete
Martin E. PembleTyndall National Institute, University College Cork
Ian M. PoveyTyndall National Institute, University College Cork

Films

Plasma VOx

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TDMAV, (Me2N)4V, [(CH3)2N]4V, Tetrakis(DiMethylAmido) Vanadium, Vanadium Dimethylamide
CAS#: 19824-56-7
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 150-300C

Thermal VOx

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TDMAV, (Me2N)4V, [(CH3)2N]4V, Tetrakis(DiMethylAmido) Vanadium, Vanadium Dimethylamide
CAS#: 19824-56-7
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 150-300C

Thermal VOx

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TDMAV, (Me2N)4V, [(CH3)2N]4V, Tetrakis(DiMethylAmido) Vanadium, Vanadium Dimethylamide
CAS#: 19824-56-7
H2O, Water
CAS#: 7732-18-5
Deposition Temperature Range = 150-300C

Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MRD X-ray Diffractometer

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Quanta 650 FEG

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: -

Characteristic: Transmittance
Analysis: UV-VIS Spectroscopy
Diagnostic: Shimadzu UV-2401

Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry
Diagnostic: -

Characteristic: Charge Capacity
Analysis: Charge/Discharge Cycling
Diagnostic: -

Substrates

ITO

Notes

1421