Martin E. Pemble Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Martin E. Pemble returned 8 record(s).

Number	Title
1	Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al₂O₃ Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO₂/In_xGa_1-xAs (M = Hf\|Zr, x = 0\|0.53) Gate Stacks
2	Evaluation of V₂O₅ Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
3	Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD
4	Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
5	High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
6	Growth of V₂O₅ Films for Battery Applications by Pulsed Chemical Vapor Deposition
7	Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
8	Structural and electrical analysis of the atomic layer deposition of HfO₂/n-In_0.53Ga_0.47As capacitors with and without an Al₂O₃ interface control layer