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M. Modreanu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M. Modreanu returned 3 record(s).

NumberTitle
1Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
2Growth of V2O5 Films for Battery Applications by Pulsed Chemical Vapor Deposition
3Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition