Shane O'Brien Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shane O'Brien returned 4 record(s).

Number	Title
1	Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
2	Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
3	Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
4	Growth of V2O5 Films for Battery Applications by Pulsed Chemical Vapor Deposition