Paul K. Hurley Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Paul K. Hurley returned 4 record(s).

Number	Title
1	Engineering Interfacial Silicon Dioxide for Improved Metal-Insulator-Semiconductor Silicon Photoanode Water Splitting Performance
2	Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al₂O₃ Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO₂/In_xGa_1-xAs (M = Hf\|Zr, x = 0\|0.53) Gate Stacks
3	Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO₂/Pt capacitors
4	High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition