Publication Information

Title:
On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR
Type:
Journal
Info:
Applied Physics Letters 116, 122101 (2020)
Date:
2020-03-04

Author Information

Name Institution
Tadayoshi SakaiNagoya University
Maki KushimotoNagoya University
Ziyi ZhangAsahi Kasei Corporation
Naoharu SugiyamaNagoya University
Leo J. SchowalterNagoya University
Yoshio HondaNagoya University
Chiaki SasaokaNagoya University
Hiroshi AmanoNagoya University

Films

Plasma Al2O3



Film/Plasma Properties

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Reflectivity
Analysis: UV-VIS Spectroscopy

Substrates

AlN
SiO2
AlGaN

Keywords

Optical
Reflectance
Bragg Reflector

Notes

1478