Maki Kushimoto Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Maki Kushimoto returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR |