Tadayoshi Sakai Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tadayoshi Sakai returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR