Atomic layer deposited (ALD) SnO2 anodes with exceptional cycleability for Li-ion batteries

Type:
Journal
Info:
Nano Energy, volume 2, issue 5, September 2013, pages 720-725
Date:
2013-09-01
DOI:
http://dx.doi.org/10.1016/j.nanoen.2012.12.007

Author Information

Name Institution
V. AravindanNanyang Technological University
K. B. JineshNanyang Technological University
Rajiv Ramanujam PrabhakarNanyang Technological University
Vinayak S. KaleNanyang Technological University
S. MadhaviNanyang Technological University

Films

Plasma SnO2

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
Tin(IV) t-butoxide, Sn(OtBu)4, Sn(OC4H9)4
CAS#: 36809-75-3
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 200C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: -

Characteristic: Thickness
Analysis: AFM, Atomic Force Microscopy
Diagnostic: -

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: -

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Characteristic: Electrochemical Performance
Analysis: Two electrode coin cell
Diagnostic: -

Characteristic: Surface Reactions
Analysis: CV, Cyclic Voltammetry
Diagnostic: Solartron 1470E

Characteristic: Charge Capacity
Analysis: Galvanostatic Cycling
Diagnostic: -

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: -

Substrates

Stainless Steel

Notes

Ultratech Fiji PEALD SnO2 for Li-ion battery anode.
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