Search 1553 plasma ALD publications by:
Search 1553 plasma ALD publications by:
Publication Information
Title:
Effects of radiation and cryogenic temperatures on the electromechanical properties of materials used in microsystems
Type:
Conference Proceedings
Info:
12th International Symposium on Materials in the Space Environment (ISME'12)
Date:
2012-09-24
Author Information
Name | Institution |
---|---|
P. Gkotsis | Universite catholique de Louvain (UCL) |
V. Kilchytska | Universite catholique de Louvain (UCL) |
Otilia Militaru | Universite catholique de Louvain (UCL) |
Guy Berger | Universite catholique de Louvain (UCL) |
C. Fragkiadakis | Hewlett-Packard |
P. B. Kirby | Cranfield University |
Jean-Pierre Raskin | Universite catholique de Louvain (UCL) |
Denis Flandre | Universite catholique de Louvain (UCL) |
Laurent A. Francis | Universite catholique de Louvain (UCL) |
Films
Plasma Al2O3
Film/Plasma Properties
Characteristic: Fixed Charge
Analysis: C-V, Capacitance-Voltage Measurements
Characteristic: Interface State Density
Analysis: C-V, Capacitance-Voltage Measurements
Characteristic: Midgap Voltage
Analysis: C-V, Capacitance-Voltage Measurements
Substrates
Si(100) |
Keywords
Radiation Hardness |
Notes
644 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |