Valeriya Kilchytska Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Valeriya Kilchytska returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effects of radiation and cryogenic temperatures on the electromechanical properties of materials used in microsystems
2Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
3Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems