Valeriya Kilchytska Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Valeriya Kilchytska returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effects of radiation and cryogenic temperatures on the electromechanical properties of materials used in microsystems
2Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems
3Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors