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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition

Type:
Journal
Info:
Optical Materials 108 (2020) 110206
Date:
2020-07-20
DOI:
https://doi.org/10.1016/j.optmat.2020.110206

Author Information

Name Institution
Melissa Chavez PortilloCiudad Universitaria
Salvador Gallardo-HernandezCinvestav
Yesmin Panecatl-BernalCiudad Universitaria
Isaac Martí­nez-VelisCinvestav
Julio Villanueva-CabBenemérita Universidad Autónoma de Puebla
Salvador AlcántaraCiudad Universitaria
Joaquin AlvaradoCiudad Universitaria

Films

Plasma AlxGa1-xN

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Where to buy precursor
TMG, trimethyl galium, GaMe3
CAS#: 1445-79-0
Where to buy precursor
H2, Hydrogen
CAS#: 1333-74-0

Where to buy onsite generators

N2, Nitrogen
CAS#: 7727-37-9
Deposition Temperature = 300C

Plasma InGaN

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
In(CH3)3, InMe3, TriMethyl Indium, TMI
CAS#: 3385-78-2
Where to buy precursor
TMG, trimethyl galium, GaMe3
CAS#: 1445-79-0
Where to buy precursor
H2, Hydrogen
CAS#: 1333-74-0

Where to buy onsite generators

N2, Nitrogen
CAS#: 7727-37-9
Deposition Temperature = 220C

Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Empyrean

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Empyrean

Characteristic: Morphology, Roughness, Topography
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Empyrean

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Empyrean

Characteristic: Optical Properties
Analysis: UV-VIS Spectroscopy
Diagnostic: Varian-Cary 5000 spectrophotometer

Characteristic: Optical Bandgap
Analysis: UV-VIS Spectroscopy
Diagnostic: Varian-Cary 5000 spectrophotometer

Characteristic: Refractive Index
Analysis: UV-VIS Spectroscopy
Diagnostic: Varian-Cary 5000 spectrophotometer

Characteristic: Chemical Composition, Impurities
Analysis: TOF-SIMS, Time of Flight Secondary Ion Mass Spectrometry
Diagnostic: ION TOF TofSIMS 5

Substrates

Silicon

Notes

1605