InGaN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing InGaN films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition
2Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures