In(CH3)3, InMe3, TriMethyl Indium, TMI, CAS# 3385-78-2

Where to buy

NumberVendorRegionLink
1DOCK/CHEMICALS🇩🇪Trimethylindium
2Strem Chemicals, Inc.🇺🇸Trimethylindium, elec. gr. (99.999%-In) contained in 50 ml electropolished cylinder for CVD/ALD
3Pegasus Chemicals🇬🇧Trimethylindium
4Strem Chemicals, Inc.🇺🇸Trimethylindium, elec. gr. (99.999%-In)
5Strem Chemicals, Inc.🇺🇸Trimethylindium, 98+% (99.9+%-In)

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 28 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition
2Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
3Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
4Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
5Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
6Perspectives on future directions in III-N semiconductor research
7Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
8Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
9Perspectives on future directions in III-N semiconductor research
10Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition
11Atomic layer deposition of InN using trimethylindium and ammonia plasma
12Direct epitaxial nanometer-thin InN of high structural quality on 4H-SiC by atomic layer deposition
13The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
14Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
15Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
16Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
17Atomic layer epitaxy for quantum well nitride-based devices
18Atomic layer epitaxy for quantum well nitride-based devices