AlxGa1-xN Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications discussing AlxGa1-xN films returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
|Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition