Title: Long period gratings coated with hafnium oxide by plasma-enhanced atomic layer deposition for refractive index measurements
Type: Journal
Info: Optics Express, v. 24, n. 7, p. 7654--7669 (2016)
Date: 2016-02-29
DOI: http://dx.doi.org/10.1364/OE.24.007654
Name
Institution
University of Victoria
University of Victoria
Simon Fraser University
University of Victoria
19962-11-9
Characteristic
Analysis
Diagnostic
Thickness
Ellipsometry
Horiba Jobin Yvon UVISEL
Refractive Index
Ellipsometry
Horiba Jobin Yvon UVISEL
Silicon
Available as section 3.3 in on-line thesis.
780
© 2014-2019 plasma-ald.com