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Search 1531 plasma ALD publications by:
Publication Information
Title:
Long period gratings coated with hafnium oxide by plasma-enhanced atomic layer deposition for refractive index measurements
Type:
Journal
Info:
Optics Express, v. 24, n. 7, p. 7654--7669 (2016)
Date:
2016-02-29
Author Information
Name | Institution |
---|---|
Luis Melo | University of Victoria |
Geoff Burton | University of Victoria |
Philip Kubik | Simon Fraser University |
Peter Wild | University of Victoria |
Films
Plasma HfO2
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Refractive Index
Analysis: Ellipsometry
Substrates
Silicon |
Keywords
Notes
Available as section 3.3 in on-line thesis. |
780 |
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