Publication Information

Title:
Long period gratings coated with hafnium oxide by plasma-enhanced atomic layer deposition for refractive index measurements
Type:
Journal
Info:
Optics Express, v. 24, n. 7, p. 7654--7669 (2016)
Date:
2016-02-29

Author Information

Name Institution
Luis MeloUniversity of Victoria
Geoff BurtonUniversity of Victoria
Philip KubikSimon Fraser University
Peter WildUniversity of Victoria

Films


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Refractive Index
Analysis: Ellipsometry

Substrates

Silicon

Keywords

Notes

Available as section 3.3 in on-line thesis.
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