Publication Information

Title: Long period gratings coated with hafnium oxide by plasma-enhanced atomic layer deposition for refractive index measurements

Type: Journal

Info: Optics Express, v. 24, n. 7, p. 7654--7669 (2016)

Date: 2016-02-29

DOI: http://dx.doi.org/10.1364/OE.24.007654

Author Information

Name

Institution

University of Victoria

University of Victoria

Simon Fraser University

University of Victoria

Films

Deposition Temperature = 150C

19962-11-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Horiba Jobin Yvon UVISEL

Refractive Index

Ellipsometry

Horiba Jobin Yvon UVISEL

Substrates

Silicon

Keywords

Notes

Available as section 3.3 in on-line thesis.

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