Publication Information

Title:
Mechanical properties of thin-film Parylene-metal-Parylene devices
Type:
Journal
Info:
Front. Mech. Eng. 1:10 (2015)
Date:
2015-08-18

Author Information

Name Institution
Curtis D LeeUniversity of Southern California (USC)
Ellis MengUniversity of Southern California (USC)

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Adhesion
Analysis: Custom

Characteristic: Bending Fatigue
Analysis: Custom

Characteristic: Damage, Defects
Analysis: EIS, Electrochemical Impedance Spectroscopy

Substrates

Parylene-N
Pt

Keywords

Notes

1392