Search 1553 plasma ALD publications by:
Search 1553 plasma ALD publications by:
Publication Information
Title:
Mechanical properties of thin-film Parylene-metal-Parylene devices
Type:
Journal
Info:
Front. Mech. Eng. 1:10 (2015)
Date:
2015-08-18
Author Information
Name | Institution |
---|---|
Curtis D Lee | University of Southern California (USC) |
Ellis Meng | University of Southern California (USC) |
Films
Plasma Al2O3
Film/Plasma Properties
Characteristic: Adhesion
Analysis: Custom
Characteristic: Bending Fatigue
Analysis: Custom
Characteristic: Damage, Defects
Analysis: EIS, Electrochemical Impedance Spectroscopy
Substrates
Parylene-N |
Pt |
Keywords
Notes
1392 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |