The publication database currently has 1511 entries.
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From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
Carbon content control of silicon oxycarbide film with methane containing plasma
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Publication Information
Title:
Mechanical properties of thin-film Parylene-metal-Parylene devices
Type:
Journal
Info:
Front. Mech. Eng. 1:10 (2015)
Date:
2015-08-18
Author Information
| Name | Institution |
|---|---|
| Curtis D Lee | University of Southern California (USC) |
| Ellis Meng | University of Southern California (USC) |
Films
Plasma Al2O3
Film/Plasma Properties
Characteristic: Adhesion
Analysis: Custom
Characteristic: Bending Fatigue
Analysis: Custom
Characteristic: Damage, Defects
Analysis: EIS, Electrochemical Impedance Spectroscopy
Substrates
| Parylene-N |
| Pt |
Keywords
Notes
| 1392 |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |