Publication Information

Title:
Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection
Type:
Journal
Info:
Biosensors 2018, 8, 72
Date:
2018-07-28

Author Information

Name Institution
Kristina A MalsagovaInstitute of Biomedical Chemistry
Tatyana O PleshakovaInstitute of Biomedical Chemistry
Andrey F KozlovInstitute of Biomedical Chemistry
Ivan D ShumovInstitute of Biomedical Chemistry
Mikhail A. IlnitskiiRussian Academy of Sciences
Andrey V. MiakonkikhMoscow Institute of Physics and Technology
Vladimir P. PopovRussian Academy of Sciences
Konstantin V. RudenkoRussian Academy of Sciences
Alexander V. GlukhovNovosibirsk Semiconductor Device Plant and Design Bureau
Igor N. KupriyanovRussian Academy of Sciences
Nina D. IvanovaSkryabin Moscow State Academy of Veterinary Medicine and Biotechnology
Alexander E. RogozhinMoscow Institute of Physics and Technology
Alexander I. ArchakovInstitute of Biomedical Chemistry
Yuri D. IvanovInstitute of Biomedical Chemistry

Films


Plasma Al2O3


Film/Plasma Properties

Substrates

Silicon

Keywords

Biosensors
Sensors

Notes

1299