Your search for plasma enhanced atomic layer deposition publications authored by Alexander V. Glukhov returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer|
|2||Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection|
|3||Ultrasensitive Detection of 2,4-Dinitrophenol Using Nanowire Biosensor|
© 2014-2020 plasma-ald.com