Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer
Type:
Journal
Info:
Semiconductors, 2016, Vol. 50, No. 5, pp 632--638.
Date:
2015-09-08
Author Information
| Name | Institution |
|---|---|
| Vladimir P. Popov | Russian Academy of Sciences |
| Mikhail A. Ilnitskii | Russian Academy of Sciences |
| E. D. Zhanaev | Russian Academy of Sciences |
| A. V. Myakon'kich | Russian Academy of Sciences |
| Konstantin V. Rudenko | Russian Academy of Sciences |
| Alexander V. Glukhov | Novosibirsk Semiconductor Device Plant and Design Bureau |
Films
Plasma Al2O3
Film/Plasma Properties
Characteristic: Transistor Characteristics
Analysis: Transistor Characterization
Characteristic: Diffusion Barrier Properties
Analysis: -
Substrates
Notes
| 618 |