Publication Information

Title:
Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer
Type:
Journal
Info:
Semiconductors, 2016, Vol. 50, No. 5, pp 632--638.
Date:
2015-09-08

Author Information

Name Institution
Vladimir P. PopovRussian Academy of Sciences
Mikhail A. IlnitskiiRussian Academy of Sciences
E. D. ZhanaevRussian Academy of Sciences
A. V. Myakon'kichRussian Academy of Sciences
Konstantin V. RudenkoRussian Academy of Sciences
Alexander V. GlukhovNovosibirsk Semiconductor Device Plant and Design Bureau

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Transistor Characteristics
Analysis: Transistor Characterization

Characteristic: Diffusion Barrier Properties
Analysis: -

Substrates

Keywords

Diffusion Barrier

Notes

618