Konstantin V. Rudenko Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Konstantin V. Rudenko returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene
2Properties of plasma enhanced atomic layer deposited ruthenium thin films from Ru(EtCp)2
3Ultrasensitive Detection of 2,4-Dinitrophenol Using Nanowire Biosensor
4Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection
5Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer
6Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor
7Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition