Konstantin V. Rudenko Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Konstantin V. Rudenko returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer
2Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene
3Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection
4Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition
5Ultrasensitive Detection of 2,4-Dinitrophenol Using Nanowire Biosensor


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