Konstantin V. Rudenko Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Konstantin V. Rudenko returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer
2Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor
3Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition
4Properties of plasma enhanced atomic layer deposited ruthenium thin films from Ru(EtCp)2
5Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene
6Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection
7Ultrasensitive Detection of 2,4-Dinitrophenol Using Nanowire Biosensor