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E. D. Zhanaev Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by E. D. Zhanaev returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer |