Andrey V. Miakonkikh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andrey V. Miakonkikh returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Properties of plasma enhanced atomic layer deposited ruthenium thin films from Ru(EtCp)2
2Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor
3Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection
4Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene
5Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN
6Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition