Your search for plasma enhanced atomic layer deposition publications authored by Andrey V. Miakonkikh returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN|
|2||Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene|
|3||Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection|
|4||Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition|
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