Andrey V. Miakonkikh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andrey V. Miakonkikh returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN
2	Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene

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