Andrey V. Miakonkikh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andrey V. Miakonkikh returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN
2Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene


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