Alexander E. Rogozhin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander E. Rogozhin returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition
2Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor
3Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection
4Properties of plasma enhanced atomic layer deposited ruthenium thin films from Ru(EtCp)2