Sean W. King Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sean W. King returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Plasma Enhanced Atomic Layer Deposition of SiN:H Using N2 and Silane
2Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
3Plasma enhanced atomic layer deposition of SiNx:H and SiO2