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Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
Ta(OC2H5)5, Ta(OEt)5, Tantalum(V) ethoxide, CAS# 6074-84-6
Where to buy
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | EpiValence | 🇬🇧 | Tantalum ethoxide |
| 2 | Ereztech | 🇺🇸 | Tantalum(V) ethoxide |
| 3 | Gelest | 🇺🇸 | Tantalum(V) Ethoxide |
| 4 | Strem Chemicals, Inc. | 🇺🇸 | Tantalum(V) ethoxide (99.99+%-Ta) |
| 5 | Strem Chemicals, Inc. | 🇺🇸 | Tantalum(V) ethoxide (99.9999%-Ta) |
| 6 | DOCK/CHEMICALS | 🇩🇪 | Tantalum(V)-ethoxide |
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.