Search 1636 plasma ALD publications by:
Ta(OC2H5)5, Ta(OEt)5, Tantalum(V) ethoxide, CAS# 6074-84-6
Where to buy
|2||Strem Chemicals, Inc.||🇺🇸||Tantalum(V) ethoxide (99.9999%-Ta)|
|6||Strem Chemicals, Inc.||🇺🇸||Tantalum(V) ethoxide (99.99+%-Ta)|
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.