Ta(OC2H5)5, Ta(OEt)5, Tantalum(V) ethoxide, CAS# 6074-84-6

Where to buy

NumberVendorLink
1EreztechTantalum (V) ethoxide (99.99+%-Ta)
2GelestTantalum(V) Ethoxide
3Strem Chemicals, Inc.Tantalum(V) ethoxide (99.9999%-Ta)
4Strem Chemicals, Inc.Tantalum(V) ethoxide (99.99+%-Ta)

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
2Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
3Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
4Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
5In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
6Increment of the Dielectric Constant of Ta2O5 Thin Films by Retarding Interface Oxide Growth on Si Substrates
7Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
8Nanochemistry, nanostructure, and electrical properties of Ta2O5 film deposited by atomic layer deposition and plasma-enhanced atomic layer deposition
9Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage


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