Ta(OC2H5)5, Ta(OEt)5, Tantalum(V) ethoxide, CAS# 6074-84-6

Where to buy

NumberVendorRegionLink
1Gelest🇺🇸Tantalum(V) Ethoxide
2Pegasus Chemicals🇬🇧Tantalum ethoxide
3Strem Chemicals, Inc.🇺🇸Tantalum(V) ethoxide (99.9999%-Ta)
4Strem Chemicals, Inc.🇺🇸Tantalum(V) ethoxide (99.99+%-Ta)
5Ereztech🇺🇸Tantalum(V) ethoxide
6DOCK/CHEMICALS🇩🇪Tantalum(V)-ethoxide

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
2Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
3Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
4Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
5Nanochemistry, nanostructure, and electrical properties of Ta2O5 film deposited by atomic layer deposition and plasma-enhanced atomic layer deposition
6Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
7Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
8In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
9Increment of the Dielectric Constant of Ta2O5 Thin Films by Retarding Interface Oxide Growth on Si Substrates