Ta(OC2H5)5, Ta(OEt)5, Tantalum(V) ethoxide, CAS# 6074-84-6

Where to buy

NumberVendorRegionLink
1DOCK/CHEMICALS🇩🇪Tantalum(V)-ethoxide
2Strem Chemicals, Inc.🇺🇸Tantalum(V) ethoxide (99.9999%-Ta)
3Pegasus Chemicals🇬🇧Tantalum ethoxide
4Strem Chemicals, Inc.🇺🇸Tantalum(V) ethoxide (99.99+%-Ta)
5Ereztech🇺🇸Tantalum(V) ethoxide
6Gelest🇺🇸Tantalum(V) Ethoxide

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
2Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
3Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
4Nanochemistry, nanostructure, and electrical properties of Ta2O5 film deposited by atomic layer deposition and plasma-enhanced atomic layer deposition
5Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
6Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
7Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
8In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
9Increment of the Dielectric Constant of Ta2O5 Thin Films by Retarding Interface Oxide Growth on Si Substrates