Ta(OC2H5)5, Ta(OEt)5, Tantalum(V) ethoxide, CAS# 6074-84-6

Where to buy

1Strem Chemicals, Inc.Tantalum(V) ethoxide (99.9999%-Ta)
2EreztechTantalum (V) ethoxide (99.99+%-Ta)
3Strem Chemicals, Inc.Tantalum(V) ethoxide (99.99+%-Ta)
4GelestTantalum(V) Ethoxide

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
2Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
3Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
4In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
5Increment of the Dielectric Constant of Ta2O5 Thin Films by Retarding Interface Oxide Growth on Si Substrates
6Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
7Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage


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