Ta(OC2H5)5, Ta(OEt)5, Tantalum(V) ethoxide, CAS# 6074-84-6

Where to buy

NumberVendorRegionLink
1EpiValenceπŸ‡¬πŸ‡§Tantalum ethoxide
2EreztechπŸ‡ΊπŸ‡ΈTantalum(V) ethoxide
3DOCK/CHEMICALSπŸ‡©πŸ‡ͺTantalum(V)-ethoxide
4Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈTantalum(V) ethoxide (99.99+%-Ta)
5Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈTantalum(V) ethoxide (99.9999%-Ta)
6GelestπŸ‡ΊπŸ‡ΈTantalum(V) Ethoxide
7Pegasus ChemicalsπŸ‡¬πŸ‡§Tantalum ethoxide

www.plasma-ald.com does not endorse any chemical suppliers. These links are provided for the benefit of our users. If a link goes bad, let us know.

If you would like your company's precursor products listed, or your existing listing changed or removed, send me an email.


Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
2Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
3Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
4In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
5Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
6Nanochemistry, nanostructure, and electrical properties of Ta2O5 film deposited by atomic layer deposition and plasma-enhanced atomic layer deposition
7Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
8Increment of the Dielectric Constant of Ta2O5 Thin Films by Retarding Interface Oxide Growth on Si Substrates
9Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes