
XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films
Type:
Journal
Info:
2019 Semicond. Sci. Technol. 34, 034004
Date:
2018-11-09
Author Information
Name | Institution |
---|---|
V.S. Patil | North Maharashtra University |
K.S. Agrawal | North Maharashtra University |
Viral Barhate | North Maharashtra University |
V.S. Patil | North Maharashtra University |
A.M. Mahajan | North Maharashtra University |
Films
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Substrates
Si(100) |
Notes
1482 |