Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:

  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

Contact us for more information.



LaCp3, Tris(cyclopentadienyl) lanthanum, CAS# 1272-23-7

Where to buy

NumberVendorRegionLink
1EreztechπŸ‡ΊπŸ‡ΈTris(cyclopentadienyl)lanthanum(III)
2Pegasus ChemicalsπŸ‡¬πŸ‡§Tris(cyclopentadienyl)lanthanum

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films