Search 1616 plasma ALD publications by:
LaCp3, Tris(cyclopentadienyl) lanthanum, CAS# 1272-23-7
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films|