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K.S. Agrawal Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by K.S. Agrawal returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1PEALD grown high-k ZrO2 thin films on SiC group IV compound semiconductor
2Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge(100) prepared by PEALD
3XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films
4Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface